Zirconium CVD Precursors

Halide precursors (HVPE)

Zirconium Tetrachloride ZrCl4

  • Melting point 437°C (21.8 atm)
  • Sublimation temperature 315°C (1 atm)
  • Condensed phase density  2.8g/cm3 (at 25°C)
  • Molar mass  233.04g/mol
ZrCl4 saturated vapor pressure
Zirconium Tetrachloride saturated vapor pressure

References

Tangri, R. P., and D. K. Bose. “Vapour pressure measurement of zirconium chloride and hafnium chloride by the transpiration technique.” Thermochimica acta 244 (1994): 249-256.