Vanadium CVD precursors

Halide precursors

Vanadium pentafluoride VF5

  • Melting point 19.5°C
  • Boiling point 48°C
  • Condensed phase density 2.48 g/cm3  (at 20°C)
  • Molar mass   145.9 g/mol
Saturated vapor pressure of VF5
Saturated vapor pressure of Vanadium Pentafluoride VF5

Vanadium tetrachloride VCl4

  • Melting point -20.5°C
  • Boiling point 153°C
  • Condensed phase density 1.82 g/cm3  (at 25°C)
  • Molar mass   192.75 g/mol
Saturated vapor pressure of VCl4
Saturated vapor pressure of Vanadium Tetrachloride VCl4

 

 

Clark, H. C., & Emeléus, H. J. (1957). 406. Some physical and chemical properties of vanadium pentafluoride. Journal of the Chemical Society (Resumed), 2119-2122.

Trevorrow, L. E., Fischer, J., & Steunenberg, R. K. (1957). The Preparation and Properties of Vanadium Pentafluoride1. Journal of the American Chemical Society, 79(19), 5167-5168.

Cavell, R. G., & Clark, H. C. (1963). DENSITY, VISCOSITY, AND SURFACE TENSION OF VANADIUM PENTAFLUORIDE. JOURNAL OF THE CHEMICAL SOCIETY, (AUG), 4261.