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GaN growth and processnig

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Tag: Titanium

Titanium CVD precursors

Halide Precursors

Titanium Tetrachloride TiCl4

  • Melting point -24.1°C
  • Boiling point 136.4°C
  • Condensed phase density 1.727g/cm3 (at 20°C)
  • Molar mass 189.71 g/mol
TiCl4 saturated vapor pressure
TiCl4 saturated vapor pressure
Posted on April 9, 2018Categories HVPETags CVD, HVPE, Precursors, Titanium
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