Nitrogen CVD precursors

Ammonia NH3

  • Melting point -77.75°C
  • Boiling point -33.42°C
  • Critical temperature 132.3°C
  • Critical pressure 11.3 MPa
  • Molar mass  17.03 g/mol
Ammonia saturated vapor pressure
Ammonia saturated vapor pressure

Hydrazine N2H4

  • Melting point 2°C
  • Boiling point 113.5°C
  • Condensed phase density 1.008g/cm3 (at 20°C)
  • Molar mass 32.05 g/mol
Hydrazine saturated vapor pressure
Hydrazine saturated vapor pressure

Stull, D. R. (1947). Inorganic compounds. Industrial & Engineering Chemistry, 39(4), 540-550.

Scott, D. W., Oliver, G. D., Gross, M. E., Hubbard, W. N., & Huffman, H. M. (1949). Hydrazine: Heat capacity, heats of fusion and vaporization, vapor pressure, entropy and thermodynamic functions. Journal of the American Chemical Society, 71(7), 2293-2297.

Silicon CVD precursors

Halide Precursors

Silicon Tetrachloride SiCl4

  • Melting point -68.9°C
  • Boiling point 57.0°C
  • Condensed phase density 1.48g/cm3 (at 20°C)
  • Molar mass 169.9 g/mol
SiCl4 saturated vapor pressure
SiCl4 saturated vapor pressure

Silicon Tetrafluoride SiF4

  • Melting point -86.8°C
  • Boiling point -65.0°C
  • Critical temperature -14.15°C
  • Critical pressure 3.75 MPa
  • Molar mass 169.9 g/mol

 

Hexachlorodisilane Si2Cl6

  • Melting point -1°C
  • Boiling point 144°C
  • Condensed phase density 1.56g/cm3 (at 25°C)
  • Molar mass 268.9 g/mol
Si2Cl6 saturated vapor pressure
Hexachlorodisilane (Si2Cl6) saturated vapor pressure

 

Stull, D. R. (1947). Inorganic compounds. Industrial & Engineering Chemistry, 39(4), 540-550.

 

Boron CVD precursors

Halide precursors

Boron Trifluoride BF3

  • Melting point  -128°C
  • Boiling point -100°C
  • Critical temperature -12.3°C
  • Critical pressure 4.99 MPa
  • Molar mass 67.81 g/mol

Boron Trifluoride BCl3

  • Melting point  -107°C
  • Boiling point  12.5°C
  • Critical temperature 178.8°C
  • Critical pressure 3.87 MPa
  • Molar mass 117.17 g/mol
Boron Trichloride (BCl3) saturated vapor pressure
Saturated vapor pressure of Boron Trichloride BCl3

 

Vanadium CVD precursors

Halide precursors

Vanadium pentafluoride VF5

  • Melting point 19.5°C
  • Boiling point 48°C
  • Condensed phase density 2.48 g/cm3  (at 20°C)
  • Molar mass   145.9 g/mol
Saturated vapor pressure of VF5
Saturated vapor pressure of Vanadium Pentafluoride VF5

Vanadium tetrachloride VCl4

  • Melting point -20.5°C
  • Boiling point 153°C
  • Condensed phase density 1.82 g/cm3  (at 25°C)
  • Molar mass   192.75 g/mol
Saturated vapor pressure of VCl4
Saturated vapor pressure of Vanadium Tetrachloride VCl4

 

 

Clark, H. C., & Emeléus, H. J. (1957). 406. Some physical and chemical properties of vanadium pentafluoride. Journal of the Chemical Society (Resumed), 2119-2122.

Trevorrow, L. E., Fischer, J., & Steunenberg, R. K. (1957). The Preparation and Properties of Vanadium Pentafluoride1. Journal of the American Chemical Society, 79(19), 5167-5168.

Cavell, R. G., & Clark, H. C. (1963). DENSITY, VISCOSITY, AND SURFACE TENSION OF VANADIUM PENTAFLUORIDE. JOURNAL OF THE CHEMICAL SOCIETY, (AUG), 4261.

Tantalum CVD Precursors

Halide Precursors

Tantalum Pentafluoride TaF5

  • Melting point 96°C
  • Boiling point 229.2°C
  • Condensed phase density  4.98 g/cm3 (at 15°C),  3.88 g/cm3 (at melting point)
  • Molar mass   275.9 g/mol
Saturated vapor pressure over liquid TaF5
Saturated vapor pressure over liquid TaF5

Tantalum Pentachloride TaCl5

  • Melting point 216.5°C
  • Boiling point 236°C
  • Condensed phase density 3.68  g/cm3 (at 28°C), 2.68  g/cm3 (at melting point)
  • Molar mass  358.2  g/mol
Saturated vapor pressure over TaCl5
Saturated vapor pressure over TaCl5

Fairbrother, F., Grundy, K. H., & Thompson, A. (1965). 121. The halides of niobium and tantalum. Part VIII. The densities, viscosities, and self-ionisation of niobium and tantalum pentafluorides. Journal of the Chemical Society (Resumed), 761-765.

Fairbrother, F., & Frith, W. C. (1951). 675. The halides of niobium (columbium) and tantalum. Part III. The vapour pressures of niobium (columbium) and tantalum pentafluorides. Journal of the Chemical Society (Resumed), 3051-3056.

Alexander, K. M., & Fairbrother, F. (1949). S 48. The halides of columbium (niobium) and tantalum. Part I. The vapour pressures of columbium (niobium) and tantalum pentachlorides and pentabromides. Journal of the Chemical Society (Resumed), S223-S227.

Niobium CVD Precursors

Halide precursors

Niobium Fluoride NbF5

  • Melting point 78.9°C
  • Boiling point 233.3°C
  • Condensed phase density 3.29g/cm3 (at 25°C), 2.69g/cm3 (at melting point)
  • Molar mass   187.9g/mol
Saturated vapor pressure over solid NbF5
Saturated vapor pressure over solid NbF5
Saturated vapor pressure over liquid NbF5
Saturated vapor pressure over liquid NbF5

Niobium Chloride NbCl5

  • Melting point 205°C
  • Boiling point 247.5°C
  • Condensed phase density 2.75 g/cm3 (at 25°C), 2.07 g/cm3 (at melting point)
  • Molar mass  270.2 g/mol
Saturated vapor pressure over NbCl5
Saturated vapor pressure over NbCl5

Fairbrother, F., & Frith, W. C. (1951). 675. The halides of niobium (columbium) and tantalum. Part III. The vapour pressures of niobium (columbium) and tantalum pentafluorides. Journal of the Chemical Society (Resumed), 3051-3056.

Junkins, J. H., Farrar Jr, R. L., Barber, E. J., & Bernhardt, H. A. (1952). Preparation and Physical Properties of Niobium Pentafluoride1. Journal of the American Chemical Society, 74(14), 3464-3466.

Fairbrother, F., Grundy, K. H., & Thompson, A. (1965). 121. The halides of niobium and tantalum. Part VIII. The densities, viscosities, and self-ionisation of niobium and tantalum pentafluorides. Journal of the Chemical Society (Resumed), 761-765.

Alexander, K. M., & Fairbrother, F. (1949). Vapor Pressures of TaCl5, TaBr5, TaI5, NbCl5, NbBrs. J. Chem. Soc, 2472, 223.

Alexander, K. M., & Fairbrother, F. (1949). S 48. The halides of columbium (niobium) and tantalum. Part I. The vapour pressures of columbium (niobium) and tantalum pentachlorides and pentabromides. Journal of the Chemical Society (Resumed), S223-S227.

Molybdenum CVD Precursors

Halide precursors (HVPE)

Molybdenum Chloride MoCl5

  • Melting point 194°C
  • Boiling point 268°C
  • Condensed phase density 2.925g/cm3 (at 25°C)
  • Molar mass  273.2 g/mol
MoCl5 saturated vapor pressure
MoCl5 saturated vapor pressure

Molybdenum Fluoride MoF6

  • Melting point 17.5°C
  • Boiling point 35°C
  • Condensed phase density 2.551g/cm3 (at 25°C)
  • Molar mass  209.9 g/mol
MoF6 saturated vapor pressure
MoF6 saturated vapor pressure

Shchukarev, S. A.; Suvorov, A. V. (Vestn. Leningr. Univ. Fiz. Khim. 16 No. 1 [1961]87/99, 89; C.A. 1961 16117)

Ruff, O., & Ascher, E. (1929). Fluorides of the eighth group of the periodic system. Z. Anorg. Allgem. Chem, 183, 193-213.

Cady, G. H., & Hargreaves, G. B. (1961). 305. The vapour pressures of some heavy transition-metal hexafluorides. Journal of the Chemical Society (Resumed), 1563-1568.

Tungsten CVD Precursors

Halide precursors (HVPE)

Tungsten Hexachloride WCl6

  • Melting point 281.5°C
  • Boiling point 348°C
  • Condensed phase density 3.52g/cm3 (at 25°C)
  • Molar mass 396.57 g/mol
WCl6 saturated vapor pressure
Saturated vapor pressure of Tungsten Hexachloride (WCl6)

Tungsten Hexafluoride WF6

  • Melting point 2.5°C
  • Boiling point 17.3°C
  • Condensed phase density 4.56 g/cm3 (solid T<-8.5°C), 3.99 g/cm3 (solid at 0°C), 3.4 g/cm3 (liquid at 20°C)
  • Molar mass 297.84 g/mol

 

Stevenson, F. D., Wicks, C. E., & Block, F. E. (1963). Vapor pressure of tungsten (VI) chloride and hafnium (IV) iodide by a metal diaphragm technique (No. BM-RI-6367). Bureau of Mines, Albany, OR (USA). Albany Metallurgy Research Center.

Siegel, S., & Northrop, D. A. (1966). X-ray diffraction studies of some transition metal hexafluorides. Inorganic Chemistry, 5(12), 2187-2188

Alyea, E. D., Gallagher, L. B., Mullens, J. H., & Teem, J. M. (1957). A WF6 bubble chamber. Il Nuovo Cimento (1955-1965), 6(6), 1480-1488.

 

Zirconium CVD Precursors

Halide precursors (HVPE)

Zirconium Tetrachloride ZrCl4

  • Melting point 437°C (21.8 atm)
  • Sublimation temperature 315°C (1 atm)
  • Condensed phase density  2.8g/cm3 (at 25°C)
  • Molar mass  233.04g/mol
ZrCl4 saturated vapor pressure
Zirconium Tetrachloride saturated vapor pressure

References

Tangri, R. P., and D. K. Bose. “Vapour pressure measurement of zirconium chloride and hafnium chloride by the transpiration technique.” Thermochimica acta 244 (1994): 249-256.