Niobium CVD Precursors

Halide precursors

Niobium Fluoride NbF5

  • Melting point 78.9°C
  • Boiling point 233.3°C
  • Condensed phase density 3.29g/cm3 (at 25°C), 2.69g/cm3 (at melting point)
  • Molar mass   187.9g/mol
Saturated vapor pressure over solid NbF5
Saturated vapor pressure over solid NbF5
Saturated vapor pressure over liquid NbF5
Saturated vapor pressure over liquid NbF5

Niobium Chloride NbCl5

  • Melting point 205°C
  • Boiling point 247.5°C
  • Condensed phase density 2.75 g/cm3 (at 25°C), 2.07 g/cm3 (at melting point)
  • Molar mass  270.2 g/mol
Saturated vapor pressure over NbCl5
Saturated vapor pressure over NbCl5

Fairbrother, F., & Frith, W. C. (1951). 675. The halides of niobium (columbium) and tantalum. Part III. The vapour pressures of niobium (columbium) and tantalum pentafluorides. Journal of the Chemical Society (Resumed), 3051-3056.

Junkins, J. H., Farrar Jr, R. L., Barber, E. J., & Bernhardt, H. A. (1952). Preparation and Physical Properties of Niobium Pentafluoride1. Journal of the American Chemical Society, 74(14), 3464-3466.

Fairbrother, F., Grundy, K. H., & Thompson, A. (1965). 121. The halides of niobium and tantalum. Part VIII. The densities, viscosities, and self-ionisation of niobium and tantalum pentafluorides. Journal of the Chemical Society (Resumed), 761-765.

Alexander, K. M., & Fairbrother, F. (1949). Vapor Pressures of TaCl5, TaBr5, TaI5, NbCl5, NbBrs. J. Chem. Soc, 2472, 223.

Alexander, K. M., & Fairbrother, F. (1949). S 48. The halides of columbium (niobium) and tantalum. Part I. The vapour pressures of columbium (niobium) and tantalum pentachlorides and pentabromides. Journal of the Chemical Society (Resumed), S223-S227.