Presentation at International Workshop on Nitride Semiconductors(IWN 2018)
Presentation ID: TuP-GR-1, 13 November 2018
Tag: HVPE
CVD Precursors
| H | He | ||||||||||||||||
| Li | Be | B | C | N | O | F | Ne | ||||||||||
| Na | Mg | Al | Si | P | S | Cl | Ar | ||||||||||
| K | Ca | Sc | Ti | V | Cr | Mn | Fe | Co | Ni | Cu | Zn | Ga | Se | As | Se | Br | Kr |
| Rb | Sr | Y | Zr | Nb | Mo | Tc | Ru | Rh | Pd | Ag | Cd | In | Sn | Sb | Te | I | Xe |
| Cs | Ba | Lu | Hf | Ta | W | Re | Os | Ir | Pt | Au | Hg | Tl | Pb | Bi | Po | At | Rn |
| Fr | Ra | Lr | Lr | Rf | Db | Sg | Bh | Hs | Mt | Dg | Rg | ||||||
| La | Ce | Pr | Nd | Pm | Sm | Eu | Gd | Tb | Dy | Ho | Er | Tm | Yb | ||||
| Ac | Th | Pa | U | Np | Pu | Am | Cm | Bk | Cf | Es | Fm | Md | No |
Nitrogen CVD precursors
Ammonia NH3
- Melting point -77.75°C
- Boiling point -33.42°C
- Critical temperature 132.3°C
- Critical pressure 11.3 MPa
- Molar mass 17.03 g/mol
Hydrazine N2H4
- Melting point 2°C
- Boiling point 113.5°C
- Condensed phase density 1.008g/cm3 (at 20°C)
- Molar mass 32.05 g/mol
Stull, D. R. (1947). Inorganic compounds. Industrial & Engineering Chemistry, 39(4), 540-550.
Scott, D. W., Oliver, G. D., Gross, M. E., Hubbard, W. N., & Huffman, H. M. (1949). Hydrazine: Heat capacity, heats of fusion and vaporization, vapor pressure, entropy and thermodynamic functions. Journal of the American Chemical Society, 71(7), 2293-2297.
Silicon CVD precursors
Halide Precursors
Silicon Tetrachloride SiCl4
- Melting point -68.9°C
- Boiling point 57.0°C
- Condensed phase density 1.48g/cm3 (at 20°C)
- Molar mass 169.9 g/mol
Silicon Tetrafluoride SiF4
- Melting point -86.8°C
- Boiling point -65.0°C
- Critical temperature -14.15°C
- Critical pressure 3.75 MPa
- Molar mass 169.9 g/mol
Hexachlorodisilane Si2Cl6
- Melting point -1°C
- Boiling point 144°C
- Condensed phase density 1.56g/cm3 (at 25°C)
- Molar mass 268.9 g/mol
Stull, D. R. (1947). Inorganic compounds. Industrial & Engineering Chemistry, 39(4), 540-550.
Titanium CVD precursors
Halide Precursors
Titanium Tetrachloride TiCl4
- Melting point -24.1°C
- Boiling point 136.4°C
- Condensed phase density 1.727g/cm3 (at 20°C)
- Molar mass 189.71 g/mol
Boron CVD precursors
Halide precursors
Boron Trifluoride BF3
- Melting point -128°C
- Boiling point -100°C
- Critical temperature -12.3°C
- Critical pressure 4.99 MPa
- Molar mass 67.81 g/mol
Boron Tricloride BCl3
- Melting point -107°C
- Boiling point 12.5°C
- Critical temperature 178.8°C
- Critical pressure 3.87 MPa
- Molar mass 117.17 g/mol
Chemical vapor deposition reactions
Pure elements
- Transition metal film: Ti, Mo, W, Nb, Re, Ta, Zr, Hf
- Non-metal film: B, C, Si, Ge
Binary compounds
- Carbides: B4C, SiC, TiC, WC, HfC, NbC, TaC, VC, ZrC
- Silicides: MoSi2, WSi2, TiSi2, V3Si, Nb3Si
- Nitrides: BN, AlN, GaN, TiN, VN, ZrN, HfN, TaN, NbN, Si3N4, Ge3N4, FexN
- Oxides: Al2O3, Ga2O3, SiO2, HfO2, Ta2O5, Nb2O5, SnO2, TiO2, ZrO2
- Borides: TiB2, ZrB2, HfB2
- Chalcogenides: MoS2, WS2, MoSe2, WSe2
Vanadium CVD precursors
Halide precursors
Vanadium pentafluoride VF5
- Melting point 19.5°C
- Boiling point 48°C
- Condensed phase density 2.48 g/cm3 (at 20°C)
- Molar mass 145.9 g/mol
Vanadium tetrachloride VCl4
- Melting point -20.5°C
- Boiling point 153°C
- Condensed phase density 1.82 g/cm3 (at 25°C)
- Molar mass 192.75 g/mol
Clark, H. C., & Emeléus, H. J. (1957). 406. Some physical and chemical properties of vanadium pentafluoride. Journal of the Chemical Society (Resumed), 2119-2122.
Trevorrow, L. E., Fischer, J., & Steunenberg, R. K. (1957). The Preparation and Properties of Vanadium Pentafluoride1. Journal of the American Chemical Society, 79(19), 5167-5168.
Cavell, R. G., & Clark, H. C. (1963). DENSITY, VISCOSITY, AND SURFACE TENSION OF VANADIUM PENTAFLUORIDE. JOURNAL OF THE CHEMICAL SOCIETY, (AUG), 4261.
Tantalum CVD Precursors
Halide Precursors
Tantalum Pentafluoride TaF5
- Melting point 96°C
- Boiling point 229.2°C
- Condensed phase density 4.98 g/cm3 (at 15°C), 3.88 g/cm3 (at melting point)
- Molar mass 275.9 g/mol
Tantalum Pentachloride TaCl5
- Melting point 216.5°C
- Boiling point 236°C
- Condensed phase density 3.68 g/cm3 (at 28°C), 2.68 g/cm3 (at melting point)
- Molar mass 358.2 g/mol
Fairbrother, F., Grundy, K. H., & Thompson, A. (1965). 121. The halides of niobium and tantalum. Part VIII. The densities, viscosities, and self-ionisation of niobium and tantalum pentafluorides. Journal of the Chemical Society (Resumed), 761-765.
Fairbrother, F., & Frith, W. C. (1951). 675. The halides of niobium (columbium) and tantalum. Part III. The vapour pressures of niobium (columbium) and tantalum pentafluorides. Journal of the Chemical Society (Resumed), 3051-3056.
Alexander, K. M., & Fairbrother, F. (1949). S 48. The halides of columbium (niobium) and tantalum. Part I. The vapour pressures of columbium (niobium) and tantalum pentachlorides and pentabromides. Journal of the Chemical Society (Resumed), S223-S227.
Niobium CVD Precursors
Halide precursors
Niobium Fluoride NbF5
- Melting point 78.9°C
- Boiling point 233.3°C
- Condensed phase density 3.29g/cm3 (at 25°C), 2.69g/cm3 (at melting point)
- Molar mass 187.9g/mol
Niobium Chloride NbCl5
- Melting point 205°C
- Boiling point 247.5°C
- Condensed phase density 2.75 g/cm3 (at 25°C), 2.07 g/cm3 (at melting point)
- Molar mass 270.2 g/mol
Fairbrother, F., & Frith, W. C. (1951). 675. The halides of niobium (columbium) and tantalum. Part III. The vapour pressures of niobium (columbium) and tantalum pentafluorides. Journal of the Chemical Society (Resumed), 3051-3056.
Junkins, J. H., Farrar Jr, R. L., Barber, E. J., & Bernhardt, H. A. (1952). Preparation and Physical Properties of Niobium Pentafluoride1. Journal of the American Chemical Society, 74(14), 3464-3466.
Fairbrother, F., Grundy, K. H., & Thompson, A. (1965). 121. The halides of niobium and tantalum. Part VIII. The densities, viscosities, and self-ionisation of niobium and tantalum pentafluorides. Journal of the Chemical Society (Resumed), 761-765.
Alexander, K. M., & Fairbrother, F. (1949). Vapor Pressures of TaCl5, TaBr5, TaI5, NbCl5, NbBrs. J. Chem. Soc, 2472, 223.
Alexander, K. M., & Fairbrother, F. (1949). S 48. The halides of columbium (niobium) and tantalum. Part I. The vapour pressures of columbium (niobium) and tantalum pentachlorides and pentabromides. Journal of the Chemical Society (Resumed), S223-S227.
