Boron CVD precursors

Halide precursors

Boron Trifluoride BF3

  • Melting point  -128°C
  • Boiling point -100°C
  • Critical temperature -12.3°C
  • Critical pressure 4.99 MPa
  • Molar mass 67.81 g/mol

Boron Tricloride BCl3

  • Melting point  -107°C
  • Boiling point  12.5°C
  • Critical temperature 178.8°C
  • Critical pressure 3.87 MPa
  • Molar mass 117.17 g/mol
Boron Trichloride (BCl3) saturated vapor pressure
Saturated vapor pressure of Boron Trichloride BCl3