Aluminum CVD precursors

Halide precursors (HVPE)

Aluminum Trichloride AlCl3

  • Melting point 192.6°C
  • Boiling point 182.7°C (sublimes)
  • Condensed phase density 2.44 g/cm3 (at 25°C)
  • Molar mass 133.34 g/mol
AlCl3 saturated vapor pressure
Saturated vapor pressure ofAlCl3

Aluminum Tribromide AlBr3

  • Melting point 98°C
  • Boiling point 255°C
  • Condensed phase density 3.01 g/cm3 (at 25°C)
  • Molar mass 266.69 g/mol

Aluminum Triiodide AlI3

  • Melting point  191°C
  • Boiling point 382°C
  • Condensed phase density 3.98g/cm3 (at 25°C)
  • Molar mass 407.69 g/mol

Metallic aluminum chlorination

Aluminum chlorides can be produced inside a reactor, by passing dry hydrogen chloride (HCl) or Chlorine (Cl2) gas over a boat with aluminum pellets. The composition of produced chlorides mainly depends on chlorination temperature – at temperatures below 900°C aluminum trichloride AlCl3 and it’s dimer Al2Cl6 are main reaction products. At higher temperatures aluminum monochloride AlCl becomes dominant.

Aluminum chlorination products
Main products of aluminum chlorination with Hydrogen Chlodire (HCl)