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Hydride vapor phase epitaxy system for bulk GaN layers deposition

Presentation at International Workshop on Nitride Semiconductors(IWN 2018)

Presentation ID: TuP-GR-1, 13 November 2018

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TRINITRI GaN HVPE Reactor

 

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Posted on November 6, 2018November 29, 2018Author voronenkovCategories HVPETags CVD, GaN, HVPE, IWN2018

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