Nitrogen CVD precursors

Ammonia NH3

  • Melting point -77.75°C
  • Boiling point -33.42°C
  • Critical temperature 132.3°C
  • Critical pressure 11.3 MPa
  • Molar mass  17.03 g/mol
Ammonia saturated vapor pressure
Ammonia saturated vapor pressure

Hydrazine N2H4

  • Melting point 2°C
  • Boiling point 113.5°C
  • Condensed phase density 1.008g/cm3 (at 20°C)
  • Molar mass 32.05 g/mol
Hydrazine saturated vapor pressure
Hydrazine saturated vapor pressure

Stull, D. R. (1947). Inorganic compounds. Industrial & Engineering Chemistry, 39(4), 540-550.

Scott, D. W., Oliver, G. D., Gross, M. E., Hubbard, W. N., & Huffman, H. M. (1949). Hydrazine: Heat capacity, heats of fusion and vaporization, vapor pressure, entropy and thermodynamic functions. Journal of the American Chemical Society, 71(7), 2293-2297.