Titanium CVD precursors

Halide Precursors

Titanium Tetrachloride TiCl4

  • Melting point -24.1°C
  • Boiling point 136.4°C
  • Condensed phase density 1.727g/cm3 (at 20°C)
  • Molar mass 189.71 g/mol
TiCl4 saturated vapor pressure
TiCl4 saturated vapor pressure