Titanium CVD precursors Halide Precursors Titanium Tetrachloride TiCl4 Melting point -24.1°C Boiling point 136.4°C Condensed phase density 1.727g/cm3 (at 20°C) Molar mass 189.71 g/mol TiCl4 saturated vapor pressure Share this:TwitterFacebookLike this:Like Loading...