Tantalum CVD Precursors

Halide Precursors

Tantalum Pentafluoride TaF5

  • Melting point 96°C
  • Boiling point 229.2°C
  • Condensed phase density  4.98 g/cm3 (at 15°C),  3.88 g/cm3 (at melting point)
  • Molar mass   275.9 g/mol
Saturated vapor pressure over liquid TaF5
Saturated vapor pressure over liquid TaF5

Tantalum Pentachloride TaCl5

  • Melting point 216.5°C
  • Boiling point 236°C
  • Condensed phase density 3.68  g/cm3 (at 28°C), 2.68  g/cm3 (at melting point)
  • Molar mass  358.2  g/mol
Saturated vapor pressure over TaCl5
Saturated vapor pressure over TaCl5

Fairbrother, F., Grundy, K. H., & Thompson, A. (1965). 121. The halides of niobium and tantalum. Part VIII. The densities, viscosities, and self-ionisation of niobium and tantalum pentafluorides. Journal of the Chemical Society (Resumed), 761-765.

Fairbrother, F., & Frith, W. C. (1951). 675. The halides of niobium (columbium) and tantalum. Part III. The vapour pressures of niobium (columbium) and tantalum pentafluorides. Journal of the Chemical Society (Resumed), 3051-3056.

Alexander, K. M., & Fairbrother, F. (1949). S 48. The halides of columbium (niobium) and tantalum. Part I. The vapour pressures of columbium (niobium) and tantalum pentachlorides and pentabromides. Journal of the Chemical Society (Resumed), S223-S227.