Molybdenum CVD Precursors

Halide precursors (HVPE)

Molybdenum Chloride MoCl5

  • Melting point 194°C
  • Boiling point 268°C
  • Condensed phase density 2.925g/cm3 (at 25°C)
  • Molar mass  273.2 g/mol
MoCl5 saturated vapor pressure
MoCl5 saturated vapor pressure

Molybdenum Fluoride MoF6

  • Melting point 17.5°C
  • Boiling point 35°C
  • Condensed phase density 2.551g/cm3 (at 25°C)
  • Molar mass  209.9 g/mol
MoF6 saturated vapor pressure
MoF6 saturated vapor pressure

Shchukarev, S. A.; Suvorov, A. V. (Vestn. Leningr. Univ. Fiz. Khim. 16 No. 1 [1961]87/99, 89; C.A. 1961 16117)

Ruff, O., & Ascher, E. (1929). Fluorides of the eighth group of the periodic system. Z. Anorg. Allgem. Chem, 183, 193-213.

Cady, G. H., & Hargreaves, G. B. (1961). 305. The vapour pressures of some heavy transition-metal hexafluorides. Journal of the Chemical Society (Resumed), 1563-1568.