Tungsten CVD Precursors

Halide precursors (HVPE)

Tungsten Hexachloride WCl6

  • Melting point 281.5°C
  • Boiling point 348°C
  • Condensed phase density 3.52g/cm3 (at 25°C)
  • Molar mass 396.57 g/mol
WCl6 saturated vapor pressure
Saturated vapor pressure of Tungsten Hexachloride (WCl6)

Tungsten Hexafluoride WF6

  • Melting point 2.5°C
  • Boiling point 17.3°C
  • Condensed phase density 4.56 g/cm3 (solid T<-8.5°C), 3.99 g/cm3 (solid at 0°C), 3.4 g/cm3 (liquid at 20°C)
  • Molar mass 297.84 g/mol


Stevenson, F. D., Wicks, C. E., & Block, F. E. (1963). Vapor pressure of tungsten (VI) chloride and hafnium (IV) iodide by a metal diaphragm technique (No. BM-RI-6367). Bureau of Mines, Albany, OR (USA). Albany Metallurgy Research Center.

Siegel, S., & Northrop, D. A. (1966). X-ray diffraction studies of some transition metal hexafluorides. Inorganic Chemistry, 5(12), 2187-2188

Alyea, E. D., Gallagher, L. B., Mullens, J. H., & Teem, J. M. (1957). A WF6 bubble chamber. Il Nuovo Cimento (1955-1965), 6(6), 1480-1488.