Halide precursors (HVPE)
Zirconium Tetrachloride ZrCl4
- Melting point 437°C (21.8 atm)
- Sublimation temperature 315°C (1 atm)
- Condensed phase density 2.8g/cm3 (at 25°C)
- Molar mass 233.04g/mol

References
Tangri, R. P., and D. K. Bose. “Vapour pressure measurement of zirconium chloride and hafnium chloride by the transpiration technique.” Thermochimica acta 244 (1994): 249-256.