Hafnium CVD Precursors

Halide precursors (HVPE)

Hafnium Tetrachloride HfCl4

  • Melting point 432°C (vapor pressure 44.4 atm)
  • Sublimation temperature 315°C (1 atm)
  • Condensed phase density  3.86 g/cm3 (at 25°C)
  • Molar mass  320.3 g/mol
HfCl4 saturated vapor pressure
Hafnium Tetrachlodire saturated vapor pressure

References

Tangri, R. P., and D. K. Bose. “Vapour pressure measurement of zirconium chloride and hafnium chloride by the transpiration technique.” Thermochimica acta 244 (1994): 249-256.