Halide precursors (HVPE)
Hafnium Tetrachloride HfCl4
- Melting point 432°C (vapor pressure 44.4 atm)
- Sublimation temperature 315°C (1 atm)
- Condensed phase density 3.86 g/cm3 (at 25°C)
- Molar mass 320.3 g/mol

References
Tangri, R. P., and D. K. Bose. “Vapour pressure measurement of zirconium chloride and hafnium chloride by the transpiration technique.” Thermochimica acta 244 (1994): 249-256.