Gallium CVD precursors

Halide precursors (HVPE)

Gallium Trichloride GaCl3

  • Melting point 78°C
  • Boiling point 201°C
  • Condensed phase density 2.47g/cm3 (at 25°C)
  • Molar mass  176.08 g/mol
GaCl3 saturated vapor pressure
Saturated vapor pressure of Gallium Trichloride (GaCl3)

Gallium Tribromide GaBr3

  • Melting point 122°C
  • Boiling point 279°C
  • Condensed phase density  3.69g/cm3 (at 25°C)
  • Molar mass  309.4g/mol

Gallium Triiodide GaI3

  • Melting point  210°C
  • Boiling point  346°C
  • Condensed phase density  4.15g/cm3 (at 25°C)
  • Molar mass   450.4g/mol

Metallic gallium chlorination

Gallium chlorides can be produced inside a reactor, by passing dry hydrogen chloride (HCl) or Chlorine (Cl2) gas over a boat with liquid gallium. The composition of produced chlorides mainly depends on chlorination temperature – at temperatures below ~350°C Gallium trichloride GaCl3 and it’s dimer Ga2Cl6 are main reaction products. At higher temperatures gallium monochloride GaCl becomes dominant.

Ga chlorination vapor composition
Main products of gallium chlorination with Hydrogen Chloride (HCl)